Nonlinear electrostatic behavior for two elastic parallel fixed–fixed and cantilever microbeams

Ghader Rezazadeh, Ahmadali Tahmasebi, Saeed Ziaei-Rad

Mechatronics, Vol. 19, No. 6, pp 840-846, 2009

ABSTRACT

In this paper, the electrostatic pull-in behavior of two elastic parallel fixed–fixed and cantilever microbeams in microelectromechanical systems (MEMS) are investigated. The nonlinear electrostatic equations are considered due to some important effects including: residual stresses, fringing field and axial stresses. Various residual stresses in two elastic parallel fixed–fixed models are considered. Step by step linearization method is used to solve the equations. The numerical results reveal that the step by step linearization method is highly efficient, and it is the easiest one to calculate the pull-in voltage. In the proposed models, the pull-in voltages are considerably decreased when compared to the pull-in voltages of simple fixed–fixed and cantilever models.

Keywords:

MEMS; Pull-in voltage; Microbeam; Residual stress; Step by step linearization method

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